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TC1201A/H Cleaner

TC1201A/H Cleaner

  • Efficiently remove particle with high pressure water
  • Capable of washing wafer, glass and PCB
  • Ion fan and CO2 buffer can remove surface static
  • Touch panel and operating parameter storage
  • Smaller outline and space-saving design
  • Built-in safeguard system
Specifications
Technical Specification
Item Specification
Work size
TC1201 : Φ12” ( 275x275 mm square)
Clean/Dry setting time
0.3sec to 30min
Clean Method
TC1201A : 二流體
TC1201H : 高壓水柱, 20 - 120kgf/cm2
Spin speed
2000rpm
Dry method
N2 or air
Options
 
Ion fan
Yes
Chuck table (ceramic type)
Yes
Two fluid nozzle
Yes
Rinse
Yes
CO2 re-ionizer
Yes
Transformer Yes
Electrical power
 
Voltage
220VAC, 1 phase, 50~60Hz
consumption
1.3kVA
Air
 
Pressure
5.0~8.0 kgf/cm2
Filtration
0.01μm/99.5% or higher
Consumption
200L/min
N2
 
Pressure
5.0~8 .0kgf/cm2
Consumption
54L/min
Water
 
Pressure
2 - 4kgf/cm2
Type
DI water
Flow rate
0.2 - 1L/min
Dimensions
TC800: 500W x 750D x 1300H
  TC1201:650W x 1100D x 1300H
Weight
TC800:200KGW, TC1200 : 250kgw
Remark:Specifications are subject to change without notice.